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Investigations of capacitively-coupled plasmas by electrostatic probe technique
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Authors
Cirino, Giuseppe
;
Castro, Raul
;
Pisani, Marcelo
;
Verdonck, Patrick
;
Mansano, Ronaldo
;
Massi, Marcos
;
Pessoa, Rodrigo
;
Barea, Luis
;
Brahim, Tayeb
;
Maciel, Homero
Conference
30th Symposium on Microelectronics Technology and Devices - SBMicro
Title
Investigations of capacitively-coupled plasmas by electrostatic probe technique
Publication type
Proceedings paper
Embargo date
9999-12-31
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