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Investigations of capacitively-coupled plasmas by electrostatic probe technique

Date

2015
Proceedings Paper
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dc.contributor.authorCirino, Giuseppe
dc.contributor.authorCastro, Raul
dc.contributor.authorPisani, Marcelo
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorMansano, Ronaldo
dc.contributor.authorMassi, Marcos
dc.contributor.authorPessoa, Rodrigo
dc.contributor.authorBarea, Luis
dc.contributor.authorBrahim, Tayeb
dc.contributor.authorMaciel, Homero
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.date.accessioned2021-10-22T18:42:26Z
dc.date.available2021-10-22T18:42:26Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25083
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7298131
dc.source.beginpage1
dc.source.conference30th Symposium on Microelectronics Technology and Devices - SBMicro
dc.source.conferencedate31/08/2015
dc.source.conferencelocationSalvador, BA Brazil
dc.source.endpage4
dc.title

Investigations of capacitively-coupled plasmas by electrostatic probe technique

dc.typeProceedings paper
dspace.entity.typePublication
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