Publication:

Investigations of capacitively-coupled plasmas by electrostatic probe technique

Date

2015

Proceedings Paper

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Files

32096.pdf 1.52 MB

Author(s)

Cirino, Giuseppe

;

;

Pisani, Marcelo

;

Verdonck, Patrick

;

Mansano, Ronaldo

;

;

Pessoa, Rodrigo

;

;

;

Statistics

1901 since deposited on 2021-10-22

Acq. date: 2026-02-24