Browsing imec Publications by imec author "f009c692778ff018791ac0d091597804f6e8c7ea"
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Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
Nagano, Fuya; Iacovo, Serena; Phommahaxay, Alain; Inoue, Fumihiro; Sleeckx, Erik; Beyer, Gerald; Beyne, Eric; De Gendt, Stefan (2020) -
Investigation of Paramagnetic Defects in SiCN and SiCO-based Wafer Bonding
Peng, Lan; Kim, Soon-Wook; Iacovo, Serena; De Vos, Joeri; Schoenaers, B.; Stesmans, A.; Afanas'ev, V. V.; Miller, Andy; Beyer, Gerald; Beyne, Eric (2020)