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Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
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Authors
Nagano, Fuya
;
Iacovo, Serena
;
Phommahaxay, Alain
;
Inoue, Fumihiro
;
Sleeckx, Erik
;
Beyer, Gerald
;
Beyne, Eric
;
De Gendt, Stefan
DOI
10.1149/2162-8777/abd260
ISSN
2162-8769
Issue
12
Journal
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
Volume
9
Title
Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
Publication type
Journal article
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2
20.500.12860/38304.2
*
2022-01-10T12:14:38Z
validation by library/open access desk
1
20.500.12860/38304
2021-11-02T16:06:48Z
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