Publication:
Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
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Acq. date: 2026-10-09
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372 since deposited on 2021-11-02
42last month
8last week
Acq. date: 2026-10-09
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1955 since deposited on 2021-11-02
14last month
2last week
Acq. date: 2026-10-09
Citations