Publication:
Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
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Acq. date: 2026-04-26
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216 since deposited on 2021-11-02
26last month
10last week
Acq. date: 2026-04-26
Views
1927 since deposited on 2021-11-02
1last month
1last week
Acq. date: 2026-04-26
Citations