Publication:
Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
Loading...
Journal
Abstract
Description
Statistics
Downloads
333 since deposited on 2021-11-02
39last month
5last week
Acq. date: 2026-09-14
Views
1943 since deposited on 2021-11-02
7last month
2last week
Acq. date: 2026-09-14
Citations
Statistics
Downloads
333 since deposited on 2021-11-02
39last month
5last week
Acq. date: 2026-09-14
Views
1943 since deposited on 2021-11-02
7last month
2last week
Acq. date: 2026-09-14
Citations