Publication:
Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
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Acq. date: 2026-10-08
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Downloads
369 since deposited on 2021-11-02
41last month
6last week
Acq. date: 2026-10-08
Views
1955 since deposited on 2021-11-02
14last month
2last week
Acq. date: 2026-10-08
Citations