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Shrinking composite core-shell nanoparticles for CMP

dc.contributor.authorArmini, Silvia
dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorWhelan, Caroline
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T00:43:08Z
dc.date.available2021-10-16T00:43:08Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10034
dc.sourceIIOimport
dc.titleShrinking composite core-shell nanoparticles for CMP
dc.typeProceedings paper
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference79th ACS Colloid and Surface Science Symposium
dc.source.conferencedate12/06/2005
dc.source.conferencelocationPotsdam, NY USA
imec.availabilityPublished - open access


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