MEMS packaging and integration for miniaturized sensor nodes
dc.contributor.author | Baert, Kris | |
dc.contributor.author | Van Hoof, Chris | |
dc.date.accessioned | 2021-10-16T00:43:29Z | |
dc.date.available | 2021-10-16T00:43:29Z | |
dc.date.issued | 2005 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10045 | |
dc.source | IIOimport | |
dc.title | MEMS packaging and integration for miniaturized sensor nodes | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.contributor.orcidimec | Van Hoof, Chris::0000-0002-4645-3326 | |
dc.source.peerreview | no | |
dc.source.conference | Semicon Europe International MEMS/MST Industry Forum | |
dc.source.conferencedate | 11/04/2005 | |
dc.source.conferencelocation | München Germany | |
imec.availability | Published - imec |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |