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Porous low-k dielectrics for advanced ULSI technology

dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-16T00:43:42Z
dc.date.available2021-10-16T00:43:42Z
dc.date.issued2005-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10051
dc.sourceIIOimport
dc.titlePorous low-k dielectrics for advanced ULSI technology
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage15
dc.source.endpage15
dc.source.conference7th International Seminar on Porous Glasses - Special Glasses
dc.source.conferencedate10/09/2005
dc.source.conferencelocationWroclaw Poland
imec.availabilityPublished - imec


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