Show simple item record

Process-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy

dc.contributor.authorWatté, J.
dc.contributor.authorProvoost, R.
dc.contributor.authorSilverans, R. E.
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-29T13:25:26Z
dc.date.available2021-09-29T13:25:26Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1009
dc.sourceIIOimport
dc.titleProcess-Induced Stress in LOPOS Isolated Si Structures Measured with Micro-Raman Spectroscopy
dc.typeOral presentation
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceAnnual Meeting of the Belgian Physical Society; May 1995;
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record