Thin epitaxial Si film growth at low temperatures for germanium processing applications

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Authors
Bonzom, Renaud; Leys, Frederik; Hellin, David; Loo, Roger; Caymax, Matty; Vandervorst, Wilfried
Conference
ASM International Epsilon User Meeting
Title
Thin epitaxial Si film growth at low temperatures for germanium processing applications
Publication type
Oral presentation
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