Epitaxial growth on germanium: kinetics and layer quality

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Authors
Bonzom, Renaud; Leys, Frederik; Loo, Roger; Caymax, Matty; Vandervorst, Wilfried
Conference
1st International Workshop on New Group IV, Semiconductor Nanoelectronics
Title
Epitaxial growth on germanium: kinetics and layer quality
Publication type
Oral presentation
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