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Growth kinetics of germanium on (100) germanium by pyrolysis of germane
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Authors
Bonzom, Renaud
;
Leys, Frederik
;
Loo, Roger
;
Dessein, Kristof
;
Vandervorst, Wilfried
;
Caymax, Matty
Conference
MRS 2005 Spring Meeting Symposium P: In situ Studies of Gas/Solid Surface Reaction Dynamics
Title
Growth kinetics of germanium on (100) germanium by pyrolysis of germane
Publication type
Oral presentation
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