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Stress issues in copper/low-k integration

dc.contributor.authorBrongersma, Sywert
dc.date.accessioned2021-10-16T00:50:49Z
dc.date.available2021-10-16T00:50:49Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10158
dc.sourceIIOimport
dc.titleStress issues in copper/low-k integration
dc.typeOral presentation
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.conference8th International Workshop on Stress-Induced Phenomena in Metallization
dc.source.conferencedate12/09/2005
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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