Show simple item record

Metallization for future interconnects

dc.contributor.authorBrongersma, Sywert
dc.date.accessioned2021-10-16T00:50:59Z
dc.date.available2021-10-16T00:50:59Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10160
dc.sourceIIOimport
dc.titleMetallization for future interconnects
dc.typeOral presentation
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.conferenceSemicon Japan
dc.source.conferencedate7/12/2005
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record