Thermal desorption spectrometry as a method of analysis for advanced interconnect materials

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Authors
Carbonell, Laure; Martin Hoyas, Ana; Whelan, Caroline; Vereecke, Guy
Book
Materials for Information Technology. Devices, Interconnects and Packaging
Title
Thermal desorption spectrometry as a method of analysis for advanced interconnect materials
Publication type
Book chapter
Embargo date
9999-12-31
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