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Direct plasma hydrogenation and SiN:H hydrogenation of thin-film polycrystalline-silicon solar cells
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Authors
Carnel, Lodewijk
;
Gordon, Ivan
;
Dekkers, Harold
;
Van Gestel, Dries
;
Van Nieuwenhuysen, Kris
;
Beaucarne, Guy
;
Poortmans, Jef
Conference
Technical Digest 15th International Photovoltaic Science and Engineering Conference
Title
Direct plasma hydrogenation and SiN:H hydrogenation of thin-film polycrystalline-silicon solar cells
Publication type
Proceedings paper
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