Show simple item record

Thin-film devices fabricated with benzocyclobutene adhesive wafer bonding

dc.contributor.authorChristiaens, Ilse
dc.contributor.authorRoelkens, G.
dc.contributor.authorDe Mesel, K.
dc.contributor.authorVan Thourhout, D.
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-16T00:57:32Z
dc.date.available2021-10-16T00:57:32Z
dc.date.issued2005-02
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10223
dc.sourceIIOimport
dc.titleThin-film devices fabricated with benzocyclobutene adhesive wafer bonding
dc.typeJournal article
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.source.peerreviewno
dc.source.beginpage517
dc.source.endpage523
dc.source.journalJournal of Lightwave Technology
dc.source.issue2
dc.source.volume23
imec.availabilityPublished - imec
imec.internalnotesISSN: 0733-8724


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record