Thin-film devices fabricated with benzocyclobutene adhesive wafer bonding

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Authors

Christiaens, Ilse; Roelkens, G.; De Mesel, K.; Van Thourhout, D.; Baets, Roel

Issue

2

Journal

Journal of Lightwave Technology

Volume

23

Title

Thin-film devices fabricated with benzocyclobutene adhesive wafer bonding

Publication type

Journal article

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