Publication:
Thin-film devices fabricated with benzocyclobutene adhesive wafer bonding
Date
| dc.contributor.author | Christiaens, Ilse | |
| dc.contributor.author | Roelkens, G. | |
| dc.contributor.author | De Mesel, K. | |
| dc.contributor.author | Van Thourhout, D. | |
| dc.contributor.author | Baets, Roel | |
| dc.contributor.imecauthor | Baets, Roel | |
| dc.contributor.orcidimec | Baets, Roel::0000-0003-1266-1319 | |
| dc.date.accessioned | 2021-10-16T00:57:32Z | |
| dc.date.available | 2021-10-16T00:57:32Z | |
| dc.date.issued | 2005-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10223 | |
| dc.source.beginpage | 517 | |
| dc.source.endpage | 523 | |
| dc.source.issue | 2 | |
| dc.source.journal | Journal of Lightwave Technology | |
| dc.source.volume | 23 | |
| dc.title | Thin-film devices fabricated with benzocyclobutene adhesive wafer bonding | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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