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Defect control in advanced high-mobility substrates

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-16T00:58:53Z
dc.date.available2021-10-16T00:58:53Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10234
dc.sourceIIOimport
dc.titleDefect control in advanced high-mobility substrates
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage125
dc.source.endpage130
dc.source.conference2nd Conference on Microelectronics, Microsystems and Nanotechnology
dc.source.conferencedate14/11/2004
dc.source.conferencelocationAthens Greece
imec.availabilityPublished - imec
imec.internalnotesJournal of Physics: Conference Series; Vol. 10


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