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Defect engineering in high-mobility substrates for advanced CMOS technologies

dc.contributor.authorClaeys, Cor
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-16T00:59:00Z
dc.date.available2021-10-16T00:59:00Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10235
dc.sourceIIOimport
dc.titleDefect engineering in high-mobility substrates for advanced CMOS technologies
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage73
dc.source.endpage89
dc.source.conferenceProceedings SBMicro: 20th Symposium on Microelectronics Technology and Devices
dc.source.conferencedate5/09/2005
dc.source.conferencelocationFlorianopolis Brazil
imec.availabilityPublished - imec
imec.internalnotesElectrochemical Society Proceedings; Vol. 2005-08


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