Show simple item record

Towards non-destructive carrier depth profiling

dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBakshi, Mira
dc.contributor.authorNicolaides, Lena
dc.contributor.authorSalnik, Alex
dc.contributor.authorOpsal, John
dc.date.accessioned2021-10-16T00:59:36Z
dc.date.available2021-10-16T00:59:36Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10240
dc.sourceIIOimport
dc.titleTowards non-destructive carrier depth profiling
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference8th International Workshop on the Fabrication, Characterization and Modeling of Ultra-Shallow Junctions in Semiconductors
dc.source.conferencedate5/06/2005
dc.source.conferencelocationDaytona Beach, FL USA
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record