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Integration challenges for multi-gate devices

dc.contributor.authorCollaert, Nadine
dc.contributor.authorBrus, Stephan
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorDixit, Abhisek
dc.contributor.authorFerain, Isabelle
dc.contributor.authorGoodwin, Michael
dc.contributor.authorKottantharayil, Anil
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVerheyen, Peter
dc.contributor.authorYim, Yong Sik
dc.contributor.authorZimmerman, Paul
dc.contributor.authorBeckx, Stephan
dc.contributor.authorDegroote, Bart
dc.contributor.authorDemand, Marc
dc.contributor.authorKim, Myeong-Cheol
dc.contributor.authorKunnen, Eddy
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorMannaert, Geert
dc.contributor.authorNeuilly, Francois
dc.contributor.authorShamiryan, Denis
dc.contributor.authorBaerts, Christina
dc.contributor.authorErcken, Monique
dc.contributor.authorLaidler, David
dc.contributor.authorLeys, Frederik
dc.contributor.authorLoo, Roger
dc.contributor.authorLisoni, Judit
dc.contributor.authorSnow, Jim
dc.contributor.authorVos, Rita
dc.contributor.authorBoullart, Werner
dc.contributor.authorPollentier, Ivan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T01:00:15Z
dc.date.available2021-10-16T01:00:15Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10244
dc.sourceIIOimport
dc.titleIntegration challenges for multi-gate devices
dc.typeProceedings paper
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorLaidler, David
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecLaidler, David::0000-0003-4055-3366
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage187
dc.source.endpage194
dc.source.conferenceProceedings International Conference on IC Design and Technology - ICICDT
dc.source.conferencedate9/05/2005
dc.source.conferencelocationAustin, TX USA
imec.availabilityPublished - imec


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