Show simple item record

Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study

dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBrijs, Bert
dc.contributor.authorMack, P.
dc.date.accessioned2021-10-16T01:01:47Z
dc.date.available2021-10-16T01:01:47Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10255
dc.sourceIIOimport
dc.titleNitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study
dc.typeProceedings paper
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceSIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry
dc.source.conferencedate12/09/2005
dc.source.conferencelocationManchester UK
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record