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Empirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients

dc.contributor.authorDe Coster, J.
dc.contributor.authorTilmans, Harrie
dc.contributor.authorden Toonder, J.M.J.
dc.contributor.authorvan Beek, J.T.M.
dc.contributor.authorRijks, T.G.S.M.
dc.contributor.authorSteeneken, P.G.
dc.contributor.authorPuers, Bob
dc.date.accessioned2021-10-16T01:06:34Z
dc.date.available2021-10-16T01:06:34Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10290
dc.sourceIIOimport
dc.titleEmpirical and theoretical characterisation of electrostatically driven MEMS structures with stress gradients
dc.typeJournal article
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorPuers, Bob
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage555
dc.source.endpage562
dc.source.journalSensors & Actuators A
dc.source.volume123-124
imec.availabilityPublished - imec


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