A method to evaluate internal cavity pressure of sealed MEMS devices

Thumbnail
Metadata
Show full item record
Authors
De Coster, Jeroen; Jourdain, Anne; Puers, Bob; Tilmans, Harrie
Conference
Proceedings 15th European Microelectronics and Packaging Conference - EPMC
Title
A method to evaluate internal cavity pressure of sealed MEMS devices
Publication type
Proceedings paper
Collections