Show simple item record

Contact patterning scheme for organo-siloxane Low-k material as pre-metal dielectric

dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorConard, Thierry
dc.contributor.authorDemuynck, Steven
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorBoullart, Werner
dc.date.accessioned2021-10-16T01:08:58Z
dc.date.available2021-10-16T01:08:58Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10305
dc.sourceIIOimport
dc.titleContact patterning scheme for organo-siloxane Low-k material as pre-metal dielectric
dc.typeProceedings paper
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorBoullart, Werner
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.source.peerreviewyes
dc.source.conference27th International Symposium on Dry Process
dc.source.conferencedate28/11/2005
dc.source.conferencelocationJeju Korea
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record