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Integrated microsystems in 3 dimensions

dc.contributor.authorDe Moor, Piet
dc.date.accessioned2021-10-16T01:09:21Z
dc.date.available2021-10-16T01:09:21Z
dc.date.issued2005-08
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10308
dc.sourceIIOimport
dc.titleIntegrated microsystems in 3 dimensions
dc.typeProceedings paper
dc.contributor.imecauthorDe Moor, Piet
dc.source.peerreviewno
dc.source.beginpage11
dc.source.endpage13
dc.source.conferenceProceedings Conference on Future Integrated Systems - FIS
dc.source.conferencedate8/08/2005
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - imec


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