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Structural characterization of ion-beam synthesized NiSi2 layers

dc.contributor.authorWu, Ming Fang
dc.contributor.authorDe Wachter, Jo
dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorMoons, Raf
dc.contributor.authorVantomme, Andre
dc.contributor.authorPattyn, Hugo
dc.contributor.authorLangouche, G.
dc.contributor.authorBender, Hugo
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorTemst, K.
dc.contributor.authorBruynseraede, Y.
dc.date.accessioned2021-09-29T13:27:06Z
dc.date.available2021-09-29T13:27:06Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1031
dc.sourceIIOimport
dc.titleStructural characterization of ion-beam synthesized NiSi2 layers
dc.typeJournal article
dc.contributor.imecauthorVan Bavel, Mieke
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorPattyn, Hugo
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage1707
dc.source.endpage12
dc.source.journalJ. Appl. Phys.
dc.source.issue3
dc.source.volume78
imec.availabilityPublished - imec


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