Structural characterization of ion-beam synthesized NiSi2 layers

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Authors

Wu, Ming Fang; De Wachter, Jo; Van Bavel, Mieke; Moons, Raf; Vantomme, Andre; Pattyn, Hugo; Langouche, G.; Bender, Hugo; Vanhellemont, Jan; Temst, K.; Bruynseraede, Y.

Issue

3

Journal

J. Appl. Phys.

Volume

78

Title

Structural characterization of ion-beam synthesized NiSi2 layers

Publication type

Journal article

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