Publication:
Structural characterization of ion-beam synthesized NiSi2 layers
Date
| dc.contributor.author | Wu, Ming Fang | |
| dc.contributor.author | De Wachter, Jo | |
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Moons, Raf | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Pattyn, Hugo | |
| dc.contributor.author | Langouche, G. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Temst, K. | |
| dc.contributor.author | Bruynseraede, Y. | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.contributor.imecauthor | Pattyn, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-09-29T13:27:06Z | |
| dc.date.available | 2021-09-29T13:27:06Z | |
| dc.date.issued | 1995 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1031 | |
| dc.source.beginpage | 1707 | |
| dc.source.endpage | 12 | |
| dc.source.issue | 3 | |
| dc.source.journal | J. Appl. Phys. | |
| dc.source.volume | 78 | |
| dc.title | Structural characterization of ion-beam synthesized NiSi2 layers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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