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Enhanced mass sensing for nanomechanical resonators with a non-rectangular cross-section

dc.contributor.authorDe Vlaminck, Iwijn
dc.contributor.authorDe Greve, Kristiaan
dc.contributor.authorNaulaerts, Rik
dc.contributor.authorSivasubramaniam, Venkatesh
dc.contributor.authorLagae, Liesbet
dc.contributor.authorTilmans, Harrie
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-16T01:11:55Z
dc.date.available2021-10-16T01:11:55Z
dc.date.issued2005-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10324
dc.sourceIIOimport
dc.titleEnhanced mass sensing for nanomechanical resonators with a non-rectangular cross-section
dc.typeProceedings paper
dc.contributor.imecauthorDe Greve, Kristiaan
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage297
dc.source.endpage300
dc.source.conferenceNSTI Nanotechnology Conference and Tradeshow
dc.source.conferencedate8/05/2005
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - imec


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