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Integration of HIMOSTM flash memory in a 90nm CMOS technology

dc.contributor.authorDe Vos, Joeri
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDemand, Marc
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorBaerts, Christina
dc.contributor.authorBeckx, Stephan
dc.contributor.authorVleugels, Frank
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-16T01:13:07Z
dc.date.available2021-10-16T01:13:07Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10332
dc.sourceIIOimport
dc.titleIntegration of HIMOSTM flash memory in a 90nm CMOS technology
dc.typeProceedings paper
dc.contributor.imecauthorDe Vos, Joeri
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDemand, Marc
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorVleugels, Frank
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecDe Vos, Joeri::0000-0002-9332-9336
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage306
dc.source.endpage315
dc.source.conferenceULSI Process Integration IV
dc.source.conferencedate15/05/2005
dc.source.conferencelocationQuebec Canada
imec.availabilityPublished - open access
imec.internalnotesElectrochemical Society Proceedings; Vol. 2005-06


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