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Minimization of MuGFET source/drain resistance using wrap-around NiSi contacts

dc.contributor.authorDixit, Abhisek
dc.contributor.authorKottantharayil, Anil
dc.contributor.authorBrus, Stephan
dc.contributor.authorRooyackers, Rita
dc.contributor.authorGoodwin, Michael
dc.contributor.authorCollaert, Nadine
dc.contributor.authorJurczak, Gosia
dc.contributor.authorDe Meyer, Kristin
dc.date.accessioned2021-10-16T01:23:30Z
dc.date.available2021-10-16T01:23:30Z
dc.date.issued2005-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10394
dc.sourceIIOimport
dc.titleMinimization of MuGFET source/drain resistance using wrap-around NiSi contacts
dc.typeProceedings paper
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.conference6th European Conference of Ultimate Integration of Silicon
dc.source.conferencedate7/04/2005
dc.source.conferencelocationBologna Italy
imec.availabilityPublished - imec


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