Authors

Dortu, Fabian; Clarysse, Trudo; Loo, Roger; Pawlak, Bartek; Delhougne, Romain; Vandervorst, Wilfried

Conference

USJ - The 8th Int. Workshop on the Fabrication, Characterization and Modeling of Ultra Shallow Junctions in Semiconductors

Title

Progress in the physical modeling of carrier illumination

Publication type

Proceedings paper