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MEMS-IC integration for RF and millimeterwave applications

dc.contributor.authorDubuc, David
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorCarchon, Geert
dc.contributor.authorDo, M. N.
dc.contributor.authorFourn, E.
dc.contributor.authorGrenier, Katia
dc.contributor.authorPlana, Robert
dc.date.accessioned2021-10-16T01:25:33Z
dc.date.available2021-10-16T01:25:33Z
dc.date.issued2005-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10405
dc.sourceIIOimport
dc.titleMEMS-IC integration for RF and millimeterwave applications
dc.typeProceedings paper
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.source.peerreviewno
dc.source.beginpage1475
dc.source.endpage1478
dc.source.conferenceProceedings European Microwave Conference
dc.source.conferencedate3/10/2005
dc.source.conferencelocationParis France
imec.availabilityPublished - imec


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