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Platinum membrane and polyimide sacrificial layer technology for RF-MEMS

dc.contributor.authorEkkels, Phillip
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-16T01:28:49Z
dc.date.available2021-10-16T01:28:49Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10423
dc.sourceIIOimport
dc.titlePlatinum membrane and polyimide sacrificial layer technology for RF-MEMS
dc.typeProceedings paper
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage84
dc.source.endpage87
dc.source.conference16th MicroMechanics Europe Workshop - MME
dc.source.conferencedate4/09/2005
dc.source.conferencelocationGoteborg Sweden
imec.availabilityPublished - imec


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