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Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization

dc.contributor.authorErnur, Didem
dc.contributor.authorTerzieva, Valentina
dc.contributor.authorSchuhmacher, Jorg
dc.contributor.authorSutcliffe, Victor
dc.contributor.authorWhelan, Caroline
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-16T01:31:15Z
dc.date.available2021-10-16T01:31:15Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10435
dc.sourceIIOimport
dc.titleCorrosion and inhibition of WNxCy barrier during chemical mechanical planarization
dc.typeJournal article
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorTerzieva, Valentina
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpageB512
dc.source.endpageB518
dc.source.journalJournal of the Electrochemical Society
dc.source.issue12
dc.source.volume152
imec.availabilityPublished - imec


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