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Impact of surface preparation on the electrical characteristics of scanning spreading resistance microscopy

dc.contributor.authorEyben, Pierre
dc.contributor.authorClarysse, Trudo
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorJanssens, Tom
dc.contributor.authorMariolle, D.
dc.contributor.authorBertin, F.
dc.contributor.authorChabli, A.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T01:32:44Z
dc.date.available2021-10-16T01:32:44Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10443
dc.sourceIIOimport
dc.titleImpact of surface preparation on the electrical characteristics of scanning spreading resistance microscopy
dc.typeMeeting abstract
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewno
dc.source.beginpage119
dc.source.conferenceProceedings of the 8th Int. Workshop on the Fabrication , Characterization and Modeling of Ultra Shallow Junctions in Semicond.
dc.source.conferencedate5/06/2005
dc.source.conferencelocationDaytona beach, FL USA
imec.availabilityPublished - imec


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