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Topside release of atomic force microscopy probes with molded diamond tips

dc.contributor.authorFouchier, Marc
dc.contributor.authorEyben, Pierre
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-16T01:35:50Z
dc.date.available2021-10-16T01:35:50Z
dc.date.issued2005-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10459
dc.sourceIIOimport
dc.titleTopside release of atomic force microscopy probes with molded diamond tips
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.source.peerreviewno
dc.source.beginpage73
dc.source.endpage78
dc.source.journalMicroelectronic Engineering
dc.source.volume78-79
imec.availabilityPublished - imec
imec.internalnotesMicro and Nano Engineering 2004 Conference in Rotterdam


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