dc.contributor.author | Fouchier, Marc | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Jamieson, Geraldine | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-16T01:35:50Z | |
dc.date.available | 2021-10-16T01:35:50Z | |
dc.date.issued | 2005-03 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10459 | |
dc.source | IIOimport | |
dc.title | Topside release of atomic force microscopy probes with molded diamond tips | |
dc.type | Journal article | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Jamieson, Geraldine | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Jamieson, Geraldine::0000-0002-6750-097X | |
dc.source.peerreview | no | |
dc.source.beginpage | 73 | |
dc.source.endpage | 78 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.volume | 78-79 | |
imec.availability | Published - imec | |
imec.internalnotes | Micro and Nano Engineering 2004 Conference in Rotterdam | |