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Theoretical investigation of nanocrystalline diamond thin film bulk acoustic resonators (FBAR) for mass sensing applications

dc.contributor.authorFrancis, Laurent
dc.contributor.authorPan, Wanling
dc.contributor.authorGeuens, Caroline
dc.contributor.authorKromka, Alexander
dc.contributor.authorTilmans, Harrie
dc.contributor.authorSteinmueller-Nethl, Doris
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-16T01:36:47Z
dc.date.available2021-10-16T01:36:47Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10464
dc.sourceIIOimport
dc.titleTheoretical investigation of nanocrystalline diamond thin film bulk acoustic resonators (FBAR) for mass sensing applications
dc.typeProceedings paper
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecVan Hoof, Chris::0000-0002-4645-3326
dc.source.peerreviewno
dc.source.beginpage232
dc.source.endpage235
dc.source.conference16th MicroMechanics Europe Workshop - MME
dc.source.conferencedate5/09/2005
dc.source.conferencelocationGöteborg Sweden
imec.availabilityPublished - imec


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