The importance of dynamic contact angles in immersion lithography and how to measure them

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Authors
Fyen, Wim; Wells, Gregg; Kocsis, Michael; Kim, H-W; Maenhoudt, Mireille
Conference
2nd International Symposium on Immersion Lithography
Title
The importance of dynamic contact angles in immersion lithography and how to measure them
Publication type
Oral presentation
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