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Rapid thermal silicidation TiSi2 and CoSi2

dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-29T13:28:27Z
dc.date.available2021-09-29T13:28:27Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1047
dc.sourceIIOimport
dc.titleRapid thermal silicidation TiSi2 and CoSi2
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage107
dc.source.endpage108
dc.source.conference3rd International Rapid Thermal Processing Conference - RTP
dc.source.conferencedate30/08/1995
dc.source.conferencelocationAmsterdam The Netherlands
imec.availabilityPublished - open access


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