Surface stabilization for higher performance AlGaN/GaN HEMT with in-situ MOVPE SiN

Publication:

2005

Proceedings Paper

Author(s)

Germain, Marianne

;

Leys, Maarten

;

Derluyn, Joff

;

Boeykens, Steven

;

Degroote, Stefan

;

;

Das, Johan

;

Vandersmissen, Raf

;

Xiao, Dongping

;

;

1965 since deposited on 2021-10-16

Acq. date: 2026-07-18