Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment

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Authors
De Coster, Walter; Brijs, Bert; Osiceanu, Petre; Alay, Josep Lluis; Caymax, Matty; Vandervorst, Wilfried
Journal
Nuclear Instruments and Methods in Physics Research B
Volume
85
Title
Ion beam mixing and oxidation of a Si/Ge-multilayer under oxygen bombardment
Publication type
Journal article
Embargo date
9999-12-31
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