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Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors

dc.contributor.authorGoux, Ludovic
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, Michael
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCasella, P.
dc.contributor.authorZambrano, R.
dc.date.accessioned2021-10-16T01:48:13Z
dc.date.available2021-10-16T01:48:13Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10518
dc.sourceIIOimport
dc.titleInfluence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
dc.typeJournal article
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.source.peerreviewno
dc.source.beginpageC865
dc.source.endpageC869
dc.source.journalJournal of the Electrochemical Society
dc.source.issue12
dc.source.volume152
imec.availabilityPublished - imec


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