Authors

Goux, Ludovic; Paraschiv, Vasile; Lisoni, Judit; Schwitters, Michael; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Casella, P.; Zambrano, R.

Issue

12

Journal

Journal of the Electrochemical Society

Volume

152

Title

Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors

Publication type

Journal article