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Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
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Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Goux, Ludovic
;
Paraschiv, Vasile
;
Lisoni, Judit
;
Schwitters, Michael
;
Maes, David
;
Haspeslagh, Luc
;
Wouters, Dirk
;
Casella, P.
;
Zambrano, R.
Journal
Journal of the Electrochemical Society
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1929
since deposited on 2021-10-16
Acq. date: 2025-12-10
Citations
Metrics
Views
1929
since deposited on 2021-10-16
Acq. date: 2025-12-10
Citations