Publication:
Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
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1931 since deposited on 2021-10-16
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Acq. date: 2026-05-17
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Statistics
Views
1931 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-05-17
Citations